Supported Data File Formats
Overview of supported 3D (topography) and 2D (image) file formats. Due to the aim of the calibration software, for data files only file read is supported.
3D (topography) file formats
| Name | Ending | Remarks |
|---|---|---|
| PE TIFF | .tif; .tiff | 16 bit single or multichannel TIFF with XMP meta data |
| ASCII | .asc | Image metrology ASCII file |
| BCR | .bcr | Image metrology binary file |
| BCRF | .bcrf | Image metrology binary file with float values |
| AL3D | .al3d | Bruker-Alicona topography data |
| Zeiss SEM3D | .sem3d | Zeiss SEM3D data |
2D (image) file formats
For 2D (image) file formats, PE image IO library is used. Therefore, all formats provided with the PE image IO library, are available within microCal.
| Name | Ending | Remarks |
|---|---|---|
| PE TIFF | .tif; .tiff | 8/16 bit single or multichannel TIFF with XMP meta data |
| LEO TIFF | .tif; .tiff | TIFF with Zeiss LEO meta data |
| FEI TIFF | .tif; .tiff | TIFF with Thermofisher-FEI meta data |
| Tescan TIFF | .tif; .tiff | TIFF with Tescan meta data |
| Hitachi TIFF | .tif; .tiff | TIFF with Hitachi meta data in belonging text file |