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Scope

microCAL is a software for automated geometrical microscope calibration with marker based calibration samples. It provides several parameter models and can be used for both 3D and 2D calibration of microscopes. This documentation is related to the new microCAL app (microCAL version 2), which is a completely new developed application with new user interface and additional functions.

microCAL_user-interface.png

Intended use

microCal is a software for automated microscope calibration using marker-based 3D or 2D calibration standards. microCal is used to geometrically calibrate and characterize various microscopes and to document the results.

Key features of microCal include:

  • Determination of the scales and orthogonality of the microscope’s lateral and vertical axes
  • Determination of geometric accuracy
  • Analysis of nonlinear deviations in 2D and 3D
  • Use of the results to correct measurement data or calibrate the microscope
  • Documentation of the results for quality management

Typical applications include:

  • 3D calibration of AFM/SPM
  • 3D calibration of topography measurements on an SEM
  • 3D calibration of confocal microscopes
  • 2D calibration of SEMs
  • Drift measurements

Thanks to the use of efficient image processing combined with statistical methods, calibration with microCal is fast and reliable. The software is suitable for both routine use in the laboratory and for characterizing microscopes in R&D.

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