AUX parameters
General
If additional boards are connected to the DISS6 device and DISS6 doesn't behave as a SEM controller, it's parameters are saved here (for example the high temperature board for Marc Willinger).
- The namespace URI is http://ns.pointelectronic.com/AUX/1.0/
- The preferred field namespace prefix is d6aux
The parameter names are board specific (card sub type) and are defined in DISSParams.xml.
MW Imaging
| Name | Description |
|---|---|
| d6aux:Bias | analog output |
| d6aux:LFD | analog output |
| d6aux:Plasma | analog output |
| d6aux:Laser | analog output |
| d6aux:EBACTemp | analog input |
| d6aux:Gauge | analog input (pressure) |
| d6aux:LFDMonitor | analog input |
| d6aux:LaserMonitor | analog input |
| d6aux:BiasEnabled | digital output |
| d6aux:GaugeEnabled | digital output |